微流控中的精密操纵技术通常依赖于超声波驱动器在液体中产生位移和压力场。然而，增强和约束声流体力常常与微型化和制造的可重复性背道而驰。本研究提出利用硅扩散制备的微制片压电薄膜膜作为引导弯曲波产生的有前途的声流体力驱动器，具有低频、电压和功率要求。引导波传播可以动态控制，以调节和限制诱导的声流体辐射力和流动。这为高度局部化的动态粒子操作功能提供了可能，例如多方向输运、图案形成和困住。该装置将微型加工和先进的声流体能力结合到一个机械强度高且具有高度可重复性的微型“落下并启动”芯片中，适合大规模生产。膜声波导驱动器为声流体应用提供了有前途的途径，例如生物传感、器官生产和原位分析物输运。

Precision manipulation techniques in microfluidics often rely on ultrasonic actuators to generate displacement and pressure fields in a liquid. However, strategies to enhance and confine the acoustofluidic forces often work against miniaturization and reproducibility in fabrication. This study presents microfabricated piezoelectric thin film membranes made via silicon diffusion for guided flexural wave generation as promising acoustofluidic actuators with low frequency, voltage, and power requirements. The guided wave propagation can be dynamically controlled to tune and confine the induced acoustofluidic radiation force and streaming. This provides for highly localized dynamic particle manipulation functionalities such as multidirectional transport, patterning, and trapping. The device combines the advantages of microfabrication and advanced acoustofluidic capabilities into a miniature "drop-and-actuate" chip that is mechanically robust and features a high degree of reproducibility for large-scale production. The membrane acoustic waveguide actuators offer a promising pathway for acoustofluidic applications such as biosensing, organoid production, and in situ analyte transport.